OAI的面板级掩模光刻机 Model 6020S，

用于FOPLP型号6020S -半自动化或自动化，实现500mm x 500mm晶圆尺寸的FO-PLP加工.

OAI’s Panel Level Mask Aligner for FOPLP Model 6020S - Semi or Automated

Enabling FO-PLP Processing at 500mm x 500mm Wafer Sizes

OAI掩模对准器，不同的印刷方式

距离: 间隙可设置在一个非常宽的范围内，增量精度1μM

软接触: •基材被带入非常柔软的机械接触曝光时的掩模。通过接触力可调软件设置

金属触点: •接触额外的氮气压力

真空接触: •真空级别控制接触力。真空度为由用户设置

OAI Mask Aligners

Various Printing Modes

PROXIMITY:

• THE GAP IS SETTABLE OVER A VERY WIDE RANGE WITH AN INCREMENTAL PRECISION OF 1μM

SOFT CONTACT:

• SUBSTRATE IS BROUGHT INTO VERY SOFT MECHANICAL CONTACT WITH THE MASK DURING EXPOSURE. THE CONTACT FORCE IS ADJUSTABLE VIA SOFTWARE SETTINGS

HARD CONTACT:

• CONTACT WITH ADDITIONAL N2 pressure VACUUM CONTACT:

• VACUUM LEVEL CONTROLS THE CONTACT FORCE. LEVEL OF VACUUM IS SET BY USER